Direct Machining of Inner Reflecting Surface for a Soft X-ray Microscope

نویسندگان

  • Kwon Su Chon
  • Yoshiharu Namba
  • Kwon-Ha Yoon
چکیده

INTRODUCTION A soft X-ray microscope can be used to investigate hydrated specimens, particularly living cells, with a high resolution about several times better than that of a visible light microscope. It can also extend to material science, plasma fusion research, magnetic research, environment science, and so on. The reflecting optics used in a soft X-ray microscope requires supersmooth surface and highly accurate figure.

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تاریخ انتشار 2006